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Vacuum Bake-Out Lab

Develop a Vacuum Bake-Out Lab to Service a Major Semiconductor Lithography Customer

Project Description

Challenge:  To develop a Vacuum Technology Center with capability of performing high purity vacuum bake-out and Residual Gas Analysis (RGA).

Result:  MEI Vacuum Center. Custom vacuum ovens capable of e-09 mbar base pressure. RGA detection levels down to e-12 mbar. Primary use is to support the semiconductor industry for vacuum bake-out, and verification of material cleanliness using residual gas analysis. Located adjacent to our clean-room facilities.