residual gas analyzer Archives - Means Engineering, Inc.

Benefits of Residual Gas Analysis

Residual Gas Analysis (RGA) is used to analyze and document gasses in a vacuum environment. Residual Gas Analyzers have been used in vacuum applications for over 25 years.

Outgassing of materials can negatively affect the assembly and performance of electronic components. RGA is an extremely effective way to monitor a vacuum system for contamination, outgassing and leaks. It also allows for the thorough analysis of gas species inside the vacuum system.

Parts of A Residual Gas Analyzer

An RGA contains an ion source, a mass analyzer and a detector. The ion source converts gas samples into ions. The mass analyzer then sorts the ions by their masses. Next, the detector measures the rate of flow of the charged particles. This process is extremely useful for the detection and quantification of contamination inside a vacuum system.

How A Vacuum System Works

A vacuum pump is used to remove air and other gasses from the vacuum chamber. This creates a low-pressure environment to conduct experiments or test mechanical devices that will be used in outer space. Vacuum chambers have multiple ports to allow for the installation of windows or instruments. These ports are covered with vacuum flanges.

A vacuum system effectively removes microscopic contaminants that might interfere with a process or equipment. A number of applications are commonly applied in a vacuum environment.

RGA As A Production Tool

When used as a production tool, an RGA can effectively increase productivity, throughput and product yield, while reducing costs. RGA is commonly used in research laboratories and manufacturing facilities all over the world.

An RGA is often used to locate contaminants in semiconductor processing systems, search for gasses desorbing off the walls of vacuum chambers and to check for possible leaks in vacuum furnaces.

Improving The Reliability of Electronics

The reliability of electronics is important for a number of industries including medical, aerospace and defense. It’s extremely important that electronic components operate for long periods of time. Unfortunately, these components often fail before they should. The best way to address this issue is with stringent quality control during the manufacturing process.

RGA and the Cleanliness of Vacuum Components

Regardless of the industry, all companies strive to run a safe operation and minimize production downtime. Even the microscopic contamination of manufacturing equipment and parts can negatively affect their performance in their integrated assemblies. Dirty equipment is less reliable and more prone to wear and breakdown.

Outgassing of materials and the generation of particles can have a significant effect on assembly. Material outgassing is of particular concern in applications where vapors can affect performance. Material selection and appropriate cleaning processes are an essential part of managing outgassing.

Understanding Residual Gas Analysis

Residual Gas Analysis is an analytical technique used for identifying gasses in a vacuum environment. During the process, a Residual Gas Analyzer (RGA) creates a beam of ions from the sample of gas being analyzed. These ions are separated into individual species based on their charge-to-mass ratios. The three main parts of an RGA are the ionizer, the mass analyzer and the ion detector.

Residual Gas Analyzers Detect and Quantify Contaminants

RGAs are used to monitor the quality of a vacuum and to detect minute traces of impurities in a low-pressure environment. A residual gas analyzer is specially designed to be used in either a laboratory or on the shop floor. They are primarily used for process control and contamination monitoring in vacuum systems. Gas analyzers can distinguish leaks from outgassing, detect helium, fingerprint the process background and determine the effectiveness of gas line purging.

Outgassing is the detachment of volatile molecules which can be absorbed or adsorbed on the surface or in the volume of a material. Outgassing prohibits fast achievement of low pressure valves and outgassing materials can deposit on surfaces, causing them damage.

Vacuum Cleanliness

Vacuum applications are becoming more important due to the large number of technologies that can only be applied in vacuum environments. The purpose of a vacuum is to remove molecules that could interfere with a process or equipment. In order to achieve optimal vacuum performance, vacuum vessels and components must be kept clean. An RGA helps achieve stringent levels of cleanliness while efficiently characterizing and quantifying micro-contaminants.

Benefits of Residual Gas Analysis